EPJ

a
b
c
d
e
ap
st
h
plus
ds
pv
ti
qt
am
n

woc
rnc

Distinguished EPJ Referees

Authors & Readers

Submission
- EPJ A
- EPJ B
- EPJ C
- EPJ D
- EPJ E
- EPJ AP
- EPJ ST
- EPJ H
- EPJ PLUS
- EPJ DS
- EPJ PV
- EPJ TI
- EPJ QT
- EPJ AM
- EPJ N
- EPJ WOC
LaTeX Macros
- EPJ A
- EPJ B
- EPJ C
- EPJ D
- EPJ E
- EPJ AP
- EPJ ST
- EPJ H
- EPJ PLUS
- EPJ DS
- EPJ TI
- EPJ QT
- EPJ WOC
TOC alert
- EPJ A
- EPJ B
- EPJ C
- EPJ D
- EPJ E
- EPJ AP
- EPJ ST
- EPJ H
- EPJ PLUS
- EPJ DS
- EPJ PV
- EPJ TI
- EPJ QT
- EPJ AM
- EPJ N
- EPJ WOC
RSS feeds
Permission Requests
Policy on Publishing Integrity
FAQ
Videos presenting EPJ

Follow @EPJscience

Download citation

CF₄ doping effects on SiOF thin films: chemical, structural and dielectric properties in PECVD-deposited films from HMDSO/O₂ vapor mixtures

R. Chabane, S. Sahli and P. Raynaud

Eur. Phys. J. B, 98 5 (2025) 112

DOI: https://doi.org/10.1140/epjb/s10051-025-00973-8

Back to the article

Topical Collections

Open calls for papers

EPJ AM Call for papers: Themed Issue on Global Advances in Electromagnetic Metasurfaces for Space
(EPJ AM)

Call for papers : Special Issue on Imaging, Diffraction, and Spectroscopy on the micro/nanoscale
(EPJ AP)

EPJ B Topical Issue : Phase Transitions and Magnetism in Spin Systems
(EPJ B)

EPJ C Topical Collection on String theory predictions for astroparticle and collider physics, and beyond
(EPJ C)

EPJD Topical Issue : Exploring Dissociative Electron Attachment Processes
(EPJ D)

EPJ E Topical Issue: Transport phenomena in multicomponent fluids under external fields
(EPJ E)

EPJ Plus Focus Point Issue: The Physics of Cancer II: Novel Models and Benchmarking Data
(EPJ PLUS)

EPJ Quantum Technology - Open Calls for Papers
(EPJ QT)

EPJ ST Special Issue: Interaction of Highly Charged Ions and Electrons with Atoms and Molecules
(EPJ ST)

EPJ Techniques and Instrumentation - Open Calls for Papers
(EPJ TI)