A novel approach towards the production of luminescent silicon nanoparticles: sputtering, gas aggregation and co-deposition with H2OK. von Haeften, C. Binns, A. Brewer, O. Crisan, P. B. Howes, M. P. Lowe, C. Sibbley-Allen and S. C. ThorntonEur. Phys. J. D, 52 1-3 (2009) 11-14DOI: https://doi.org/10.1140/epjd/e2009-00024-x