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Ordering of SiO_xH_yC_z islands deposited by atmospheric pressure microwave plasma torch on Si(100) substrates patterned by nanoindentation

X. Landreau, B. Lanfant, T. Merle, E. Laborde, C. Dublanche-Tixier and P. Tristant

Eur. Phys. J. D, 65 3 (2011) 421-428

DOI: https://doi.org/10.1140/epjd/e2011-20503-7

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