Ultrasound harmonic generation and atomic layer deposition of multilayer, deep-UV mirrors and filters with microcavity plasma arraysJinhong Kim, Andrey Mironov, Sehyun Park, Changgong Kim, Sung-Jin Park and J. Gary EdenEur. Phys. J. D, 77 5 (2023) 73DOI: https://doi.org/10.1140/epjd/s10053-023-00651-3