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The effects of simultaneous electrophoresis and thermophoresis on particulate contamination of an inverted EUVL photomask surface in parallel airflow

Handol Lee, Se-Jin Yook and Seog Young Han

Eur. Phys. J. Plus, 127 10 (2012) 122

DOI: https://doi.org/10.1140/epjp/i2012-12122-y

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