Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiationG. García, M. Martin, M. D. Ynsa, V. Torres-Costa, M. L. Crespillo, M. Tardío, J. Olivares, F. Bosia, O. Peña-Rodríguez, J. Nicolas and M. TallaridaEur. Phys. J. Plus, 137 10 (2022) 1157DOI: https://doi.org/10.1140/epjp/s13360-022-03358-3