Whole-wafer fabrication process for three-terminal double stacked tunnel junctions G. P. Pepe, G. Peluso, R. Scaldaferri, L. Parlato, C. Granata, E. Esposito and M. Russo Eur. Phys. J. B, 23 4 (2001) 421-425 Published online: 15 October 2001 DOI: 10.1007/s100510170032