Some aspects of pulsed laser deposition of Si nanocrystalline films B. Polyakov, A. Petruhins, J. Butikova, A. Kuzmin and I. Tale Eur. Phys. J. Appl. Phys., 48 2 (2009) 20502 Published online: 17 September 2009 DOI: 10.1051/epjap/2009140