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Global scattering functions: a tool for grazing incidence small angle X-ray scattering (GISAXS) data analysis of low correlated lateral structures

S. Lenz, M. Bonini, S. K. Nett, M. C. Lechmann, S. G.J. Emmerling, R. S. Kappes, M. Memesa, A. Timmann, S. V. Roth and J. S. Gutmann

Eur. Phys. J. Appl. Phys., 51 1 (2010) 10601

Published online: 17 June 2010

DOI: 10.1051/epjap/2010064

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