EPJ

Evolution of high aspect ratio and nano-grass structures using a modified low plasma density reactive ion etching

M. Mehran, Z. Kolahdouz, Z. Sanaee, S. Azimi and S. Mohajerzadeh

Eur. Phys. J. Appl. Phys., 55 1 (2011) 11302

Published online: 21 July 2011

DOI: 10.1051/epjap/2011100362

M. Mehran

Z. Kolahdouz

Z. Sanaee

S. Azimi

S. Mohajerzadeh

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