EPJ

Correlations of plasma parameters and properties of magnetron sputtered TiN films

N. Kumari, P.S. Das, N.K. Joshi and P.K. Barhai

Eur. Phys. J. Appl. Phys., 59 2 (2012) 20302

Published online: 03 September 2012

DOI: 10.1051/epjap/2012120108

N. Kumari

P.S. Das

N.K. Joshi

P.K. Barhai

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