High performance AlGaN/GaN power switch with Si3N4 insulation Defeng Lin, Xiaoliang Wang, Hongling Xiao, He Kang, Cuimei Wang, Lijuan Jiang, Chun Feng, Hong Chen, Qingwen Deng, Yang Bi et al. (2 more) Eur. Phys. J. Appl. Phys., 61 1 (2013) 10101 Published online: 14 January 2013 DOI: 10.1051/epjap/2012120366