EPJ

Effect of Ar annealing temperature on SiO₂/SiC:SiO₂ densification change causing leakage current reduction

Zhi Qin Zhong, Zi Jiao Sun, Shu Ya Wang, Li Ping Dai and Guo Jun Zhang

Eur. Phys. J. Appl. Phys., 62 2 (2013) 20301

Published online: 30 April 2013

DOI: 10.1051/epjap/2013120491

Zhi Qin Zhong

Zi Jiao Sun

Shu Ya Wang

Li Ping Dai

Guo Jun Zhang

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