EPJ

Properties of nano-crystalline silicon thin film fabricated by electron beam exposure

Eun Hye Lee, Su Woong Lee, Young Ju Eom, Hae Na Won, Jin Jang, Byeong Yeon Moon and Kyu Chang Park

Eur. Phys. J. Appl. Phys., 63 2 (2013) 20302

Published online: 27 August 2013

DOI: 10.1051/epjap/2013130161

Eun Hye Lee

Su Woong Lee

Young Ju Eom

Hae Na Won

Jin Jang

Byeong Yeon Moon

Kyu Chang Park

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