Deposition and characterization of highly energetic Al/MoOx multilayer nano-films Shuai Fu, Ying Zhu, Dongle Li, Peng Zhu, Bo Hu, Yinghua Ye and Ruiqi Shen Eur. Phys. J. Appl. Phys., 64 3 (2013) 30301 Published online: 09 December 2013 DOI: 10.1051/epjap/2013130203