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AlN thin films deposited by DC reactive magnetron sputtering: effect of oxygen on film growth

Javier García Molleja, Bernardo José Gómez, Julio Ferrón, Eric Gautron, Juan Bürgi, Bassam Abdallah, Mohamed Abdou Djouadi, Jorge Feugeas and Pierre-Yves Jouan

Eur. Phys. J. Appl. Phys., 64 2 (2013) 20302

Published online: 15 November 2013

DOI: 10.1051/epjap/2013130445

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