Surface and electrical properties of plasma processed RF sputtered GaN thin films Subramani Shanmugan, Devarajan Mutharasu and Zhi Yin Lee Eur. Phys. J. Appl. Phys., 68 3 (2014) 30303 Published online: 05 December 2014 DOI: 10.1051/epjap/2014140225