The role of Ar flow rates on synthesis of nanostructured zirconium nitride layer growth using plasma enhanced hot filament nitriding (PEHFN) technique
Eur. Phys. J. Appl. Phys., 69 1 (2015) 10801
Published online: 07 January 2015
DOI: 10.1051/epjap/2014140246