Electrical characterization of Si doped AlN films synthesized by pulsed laser deposition Simeon Simeonov, Silvia Bakalova, Anna Szekeres, Ivaylo Minkov, Gabriel Socol, Carmen Ristoscu and Ion Mihailescu Eur. Phys. J. Appl. Phys., 70 1 (2015) 10102 Published online: 21 April 2015 DOI: 10.1051/epjap/2015140163