EPJ

Design and fabrication of a MEMS high-efficiency NIR-scanning grating based on tilted (1 1 1) silicon wafer

Qiuyu Nie, Zhiyu Wen and Jian Huang

Eur. Phys. J. Appl. Phys., 72 1 (2015) 10702

Published online: 30 September 2015

DOI: 10.1051/epjap/2015150285

Qiuyu Nie

Zhiyu Wen

Jian Huang

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