EPJ

DBD reactor design and optimization in continuous AP-PECVD from HMDSO/N₂/N₂O mixture

Petr Hotmar, Hubert Caquineau, Raphaël Cozzolino and Nicolas Gherardi

Eur. Phys. J. Appl. Phys., 73 2 (2016) 20801

Published online: 29 February 2016

DOI: 10.1051/epjap/2016150525

Petr Hotmar

Hubert Caquineau

Raphaël Cozzolino

Nicolas Gherardi

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