EPJ

Analysis and detection of an incorrect profile shape in a classical scatterometric process

Zaki Sabit Fawzi, Stéphane Robert, Ismail El Kalyoubi and Bernard Bayard

Eur. Phys. J. Appl. Phys., 76 3 (2016) 31001

Published online: 09 January 2017

DOI: 10.1051/epjap/2016160157

Zaki Sabit Fawzi

Stéphane Robert

Ismail El Kalyoubi

Bernard Bayard

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