Bias voltage effect on magnetron sputtered titanium aluminum nitride TiAlN thin films properties Zouina Amina Ait-Djafer, Nadia Saoula, Daniel Wamwangi, Noureddine Madaoui and Hamid Aknouche Eur. Phys. J. Appl. Phys., 86 3 (2019) 30301 Published online: 30 July 2019 DOI: 10.1051/epjap/2019180344