Fabrication and repair of GaN nanorods by plasma etching with self-assembled nickel nanomasks Shiying Zhang, Lei Zhang, Yueyao Zhong, Guodong Wang and Qingjun Xu Eur. Phys. J. Appl. Phys., 93 3 (2021) 30405 Published online: 30 March 2021 DOI: 10.1051/epjap/2021210002