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Regulation of electrical properties of ZrO_xN_y by oxygen doping and zirconium vacancies

Junfei Cai, Sicheng Wu and Jinjin Li

Eur. Phys. J. Appl. Phys., 96 3 (2021) 30103

Published online: 14 December 2021

DOI: 10.1051/epjap/2021210156

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