EPJ

Aerosol assisted atmospheric pressure plasma jet for a high deposition rate of silica-like thin films

Romain Magnan, Richard Clergereaux, Christina Villeneuve-Faure, Benoît Lantin, Guillaume Carnide, Patrice Raynaud and Nicolas Naude

Eur. Phys. J. Appl. Phys., 97 (2022) 37

Published online: 21 June 2022

DOI: 10.1051/epjap/2022210291

Romain Magnan

Richard Clergereaux

Christina Villeneuve-Faure

Benoît Lantin

Guillaume Carnide

Patrice Raynaud

Nicolas Naude

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