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The discharged characteristics of capacitively coupled Ar/N₂ plasma driven by the dual frequency 8/100 MHz

Guiqin Yin, Youyou Zhou and Qianghua Yuan

Eur. Phys. J. Appl. Phys., 98 (2023) 38

Published online: 29 May 2023

DOI: 10.1051/epjap/2023220332

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