EPJ

Angular distribution of sputtered particles from Inconel⁷¹⁸: a simulation study

Kawtar Bria, Mohammed Ait El Fqih, Jean-Michel Nunzi, Lamia Jadoual and Abdelilah Kaddouri

Eur. Phys. J. Appl. Phys., 98 (2023) 26

Published online: 17 April 2023

DOI: 10.1051/epjap/2023220334

Kawtar Bria

Mohammed Ait El Fqih

Jean-Michel Nunzi

Lamia Jadoual

Abdelilah Kaddouri

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