EPJ

Impedance matching for optimization of power transfer in a capacitively excited RF plasma reactor

M. Mohamed Salem, J.-F. Loiseau and B. Held

Eur. Phys. J. AP, 3 1 (1998) 91-95

Published online: 15 July 1998

DOI: 10.1051/epjap:1998208

M. Mohamed Salem

J.-F. Loiseau

B. Held

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