A comprehensive study of beryllium diffusion in InGaAs using different forms of kick-out mechanism J. Marcon, S. Koumetz, K. Ketata, M. Ketata and J. G. Caputo Eur. Phys. J. AP, 8 1 (1999) 7-18 Published online: 15 October 1999 DOI: 10.1051/epjap:1999223