The modeling of beryllium diffusion in InGaAsP layers grown by GSMBE under nonequilibrium conditions M. Ketata, K. Ketata, S. Koumetz, J. Marcon and C. Dubois Eur. Phys. J. AP, 8 1 (1999) 19-24 Published online: 15 October 1999 DOI: 10.1051/epjap:1999224