EPJ

Design of a micro-mechanical capacitor with microwave functions

G. Bazin, P. Sangouard and P. Bildstein

Eur. Phys. J. AP, 9 1 (2000) 75-80

Published online: 15 January 2000

DOI: 10.1051/epjap:2000203

G. Bazin

P. Sangouard

P. Bildstein

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