EPJ

Pulsed laser deposition of c-axis oriented aluminum nitride thin films on silicon

M. Tabbal, P. Mérel, M. Chaker and H. Pépin

Eur. Phys. J. AP, 14 2 (2001) 115-119

Published online: 15 May 2001

DOI: 10.1051/epjap:2001145

M. Tabbal

P. Mérel

M. Chaker

H. Pépin

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