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Two-dimensional modelling of CH₄-H₂ radio-frequency discharges for a-C:H deposition

O. Leroy, H. Videlot and J. Jolly

Eur. Phys. J. AP, 16 2 (2001) 121-130

Published online: 15 November 2001

DOI: 10.1051/epjap:2001201

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