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Deuteron implantation into hexagonal silicon carbide: defects and deuterium behaviour

A. Shiryaev, A. van Veen, A. Rivera, M. van Huis, T. Bus, W. M. Arnoldbik, N. Tomozeiu, F. H. P. M. Habraken, R. Delamare and E. Ntsoenzok

Eur. Phys. J. AP, 23 1 (2003) 11-18

Published online: 29 November 2002

DOI: 10.1051/epjap:2002116

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