Growth of ultra-thin and highly relaxed SiGe layers under in-situ introduction of point defects K. Lyutovich, M. Oehme and F. Ernst Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 341-344 Published online: 15 July 2004 DOI: 10.1051/epjap:2004051