EPJ

Non-destructive optical methods for assessing defects in production of Si or SiGe materials

V. Higgs, N. Laurent, C. Fellous and D. Dutarte

Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 43-48

Published online: 15 July 2004

DOI: 10.1051/epjap:2004075

V. Higgs

N. Laurent

C. Fellous

D. Dutarte

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