EPJ

Photoluminescence and X-ray topography measurements on oxidation-induced stacking faults in silicon wafers

H. Kakui, M. Fukuzawa, Y. Shiraishi and M. Yamada

Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 447-450

Published online: 15 July 2004

DOI: 10.1051/epjap:2004104

H. Kakui

M. Fukuzawa

Y. Shiraishi

M. Yamada

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