DLTS study of deep centers created by Ar-ion bombardment in n- and p-type MBE AlGaAs M. Kaniewska, J. Sadowski and M. Guziewicz Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 213-217 Published online: 15 July 2004 DOI: 10.1051/epjap:2004127