EPJ

Control and monitoring of optical thin films deposition in a Matrix Distributed Electron Cyclotron Resonance reactor

D. Daineka, D. Kouznetsov, P. Bulkin, G. Girard, J.-E. Bourée and B. Drévillon

Eur. Phys. J. Appl. Phys., 28 3 (2004) 343-346

Published online: 23 November 2004

DOI: 10.1051/epjap:2004198

D. Daineka

D. Kouznetsov

P. Bulkin

G. Girard

J.-E. Bourée

B. Drévillon

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