Annealing induced structural changes in electron beam evaporated Si/Ge multilayers S. Tripathi, R. Brajpuriya, A. Sharma, T. Shripathi and S. M. Chaudhari Eur. Phys. J. Appl. Phys., 34 1 (2006) 13-19 Published online: 23 March 2006 DOI: 10.1051/epjap:2006028