EPJ

Influence of hydrogen partial pressure on growth and properties of nanocrystalline SiC by magnetron sputtering

M. Madani, H. Colder, X. Portier, K. Zellama, R. Rizk and H. Bouchriha

Eur. Phys. J. Appl. Phys., 36 1 (2006) 17-23

Published online: 06 October 2006

DOI: 10.1051/epjap:2006106

M. Madani

H. Colder

X. Portier

K. Zellama

R. Rizk

H. Bouchriha

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