A combined FEG-SEM and TEM study of silicon nanodot assembly P. Donnadieu, F. Roussel, V. Cocheteau, B. Caussat, P. Mur and E. Scheid Eur. Phys. J. Appl. Phys., 44 1 (2008) 11-19 Published online: 30 April 2008 DOI: 10.1051/epjap:2008063