EPJ

Characterizing time-dependent mechanics in metallic MEMS

L.I.J.C. Bergers, N.K.R. Delhey, J.P.M. Hoefnagels and M.G.D. Geers

EPJ Web of Conferences, 6 (2010) 40002

Published online: 10 June 2010

DOI: 10.1051/epjconf/20100640002

L.I.J.C. Bergers

N.K.R. Delhey

J.P.M. Hoefnagels

M.G.D. Geers

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