EPJ

Counter-facing plasma guns for efficient extreme ultra-violet plasma light source

Yusuke Kuroda, Akiko Yamamoto, Hajime Kuwabara, Mitsuo Nakajima, Tohru Kawamura and Kazuhiko Horioka

EPJ Web of Conferences, 59 (2013) 18006

Published online: 15 November 2013

DOI: 10.1051/epjconf/20135918006

Yusuke Kuroda

Akiko Yamamoto

Hajime Kuwabara

Mitsuo Nakajima

Tohru Kawamura

Kazuhiko Horioka

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