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CVD diamond with boron-doped delta-layers deposited by microwave plasma

A.L. Vikharev, A.M. Gorbachev, M.A. Lobaev, D.B. Radishev, V.A. Isaev, S.A. Bogdanov, M.N. Drozdov, E.V. Demidov, E.A. Surovegina, V.I. Shashkin et al. (2 more)

EPJ Web Conf., 149 (2017) 01010

Published online: 04 August 2017

DOI: 10.1051/epjconf/201714901010

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CVD diamond with boron-doped delta-layers deposited by microwave plasma

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