EPJ

Optical emission spectroscopy for diagnosis of diamond growth and etching processes in microwave plasma

V.Yu. Yurov, E.V. Bushuev, A.P. Bolshakov, I.A. Antonova, V.G. Ralchenko and V.I. Konov

EPJ Web Conf., 149 (2017) 02013

Published online: 04 August 2017

DOI: 10.1051/epjconf/201714902013

V.Yu. Yurov

E.V. Bushuev

A.P. Bolshakov

I.A. Antonova

V.G. Ralchenko

V.I. Konov

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