Development of the micro pixel chamber based on MEMS technology T. Takemura, A. Takada, T. Kishimoto, S. Komura, H. Kubo, Y. Matsuoka, K. Miuchi, S. Miyamoto, T. Mizumoto, Y. Mizumura et al. (11 more) EPJ Web Conf., 174 (2018) 02010 Published online: 21 February 2018 DOI: 10.1051/epjconf/201817402010