EPJ

Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements

Jan Krüger, Rainer Köning and Bernd Bodermann

EPJ Web Conf., 238 (2020) 06010

Published online: 20 August 2020

DOI: 10.1051/epjconf/202023806010

Jan Krüger

Rainer Köning

Bernd Bodermann

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