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Crystallization of HfO₂ thin films and their influence on laser induced damage

Zoltán Balogh-Michels, Igor Stevanovic, Ruggero Frison, Andreas Bächli, Daniel Schachtler, Thomas Gischkat, Antonia Neels, Alexander Stuck and Roelene Botha

EPJ Web Conf., 238 (2020) 12004

Published online: 20 August 2020

DOI: 10.1051/epjconf/202023812004

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Zoltán Balogh-Michels

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Crystallization of HfO2 thin films and their influence on laser induced damage

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Crystallization of HfO₂ thin films and their influence on laser induced damage